Pec etching of (20-2-1) semipolar gallium nitride for external efficiency enhancement in light emitting diode applications

TitlePec etching of (20-2-1) semipolar gallium nitride for external efficiency enhancement in light emitting diode applications
Publication TypeMiscellaneous
Year of Publication2014
AuthorsChung-Ta, HSU., C-Y. Huang, Y. Zhao, S-C. Haung, D. F. Feezell, S. P. DenBaars, S. Nakamura, and J. S. Speck