| Title | Etching technique for the fabrication of thin (Al, In, Ga) N layers |
| Publication Type | Miscellaneous |
| Year of Publication | 2010 |
| Authors | Speck, J. S., B. A. Haskell, M. P Pattison, and T. J. Baker |
| Title | Etching technique for the fabrication of thin (Al, In, Ga) N layers |
| Publication Type | Miscellaneous |
| Year of Publication | 2010 |
| Authors | Speck, J. S., B. A. Haskell, M. P Pattison, and T. J. Baker |