| Title | Low damage dry etch for III-nitride light emitters |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Nedy, J. G., N. G. Young, K. M. Kelchner, Y. Hu, R. M. Farrell, S. Nakamura, S. P. DenBaars, C. Weisbuch, and J. S. Speck |
| Journal | Semiconductor Science and Technology |
| Volume | 30 |
| Pagination | 085019 |