Title | Antimony segregation in the oxidation of AlAsSb interlayers |
Publication Type | Journal Article |
Year of Publication | 2003 |
Authors | Andrews, AM., KL. van Horn, T. Mates, and JS. Speck |
Journal | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
Volume | 21 |
Pagination | 1883–1891 |