Antimony segregation in the oxidation of AlAsSb interlayers

TitleAntimony segregation in the oxidation of AlAsSb interlayers
Publication TypeJournal Article
Year of Publication2003
AuthorsAndrews, AM., KL. van Horn, T. Mates, and JS. Speck
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume21
Pagination1883–1891