Ion implantation for unalloyed ohmic contacts to AlGaN/GaN HEMTs

TitleIon implantation for unalloyed ohmic contacts to AlGaN/GaN HEMTs
Publication TypeConference Paper
Year of Publication2004
AuthorsYu, H., L. McCarthy, S. Rajan, S. Keller, SP. DenBaars, JS. Speck, and UK. Mishra
Conference NameDevice Research Conference, 2004. 62nd DRC. Conference Digest [Includes' Late News Papers' volume]
PublisherIEEE