| Title | Strain relaxation of InGaAs by lateral oxidation of AlAs |
| Publication Type | Journal Article |
| Year of Publication | 2000 |
| Authors | Mathis, SK., P. Chavarkar, AM. Andrews, UK. Mishra, and JS. Speck |
| Journal | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena |
| Volume | 18 |
| Pagination | 2066–2071 |