Title | Growth and manufacture of reduced dislocation density and free-standing aluminum nitride films by hydride vapor phase epitaxy |
Publication Type | Miscellaneous |
Year of Publication | 2010 |
Authors | Kamber, D. S., S. Nakamura, and J. S. Speck |
Title | Growth and manufacture of reduced dislocation density and free-standing aluminum nitride films by hydride vapor phase epitaxy |
Publication Type | Miscellaneous |
Year of Publication | 2010 |
Authors | Kamber, D. S., S. Nakamura, and J. S. Speck |