Title | Pure AlN layers in metal-polar AlGaN/AlN/GaN and AlN/GaN heterostructures grown by low-temperature ammonia-based molecular beam epitaxy |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Kaun, S. W., B. Mazumder, M. N. Fireman, E. C. H. Kyle, U. K. Mishra, and J. S. Speck |
Journal | Semiconductor Science and Technology |
Volume | 30 |
Pagination | 055010 |