Title | Atom probe tomography studies of Al2O3 gate dielectrics on GaN |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Mazumder, B., X. Liu, R. Yeluri, F. Wu, U. K. Mishra, and J. S. Speck |
Journal | Journal of Applied Physics |
Volume | 116 |
Pagination | 134101 |