Atom probe tomography studies of Al2O3 gate dielectrics on GaN

TitleAtom probe tomography studies of Al2O3 gate dielectrics on GaN
Publication TypeJournal Article
Year of Publication2014
AuthorsMazumder, B., X. Liu, R. Yeluri, F. Wu, U. K. Mishra, and J. S. Speck
JournalJournal of Applied Physics
Volume116
Pagination134101