Quadrupole mass spectrometry desorption analysis of Ga adsorbate on AlN (0001)

TitleQuadrupole mass spectrometry desorption analysis of Ga adsorbate on AlN (0001)
Publication TypeJournal Article
Year of Publication2006
AuthorsBrown, J. S., G. Koblmüller, R. Averbeck, H. Riechert, and J. S. Speck
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume24
Pagination1979–1984