AlGaN/GaN HEMTs with large angle implanted nonalloyed ohmic contacts

TitleAlGaN/GaN HEMTs with large angle implanted nonalloyed ohmic contacts
Publication TypeConference Paper
Year of Publication2007
AuthorsRecht, F., L. McCarthy, L. Shen, C. Poblenz, A. Corrion, JS. Speck, and UK. Mishra
Conference NameDevice Research Conference, 2007 65th Annual
PublisherIEEE