Systematic investigation of the growth rate of β-Ga2O3 (010) by plasma-assisted molecular beam epitaxy

TitleSystematic investigation of the growth rate of β-Ga2O3 (010) by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2014
AuthorsOkumura, H., M. Kita, K. Sasaki, A. Kuramata, M. Higashiwaki, and J. S. Speck
JournalApplied Physics Express
Volume7
Pagination095501