| Title | Metalorganic chemical vapor deposition conditions for efficient silicon doping in high Al-composition AlGaN films |
| Publication Type | Journal Article |
| Year of Publication | 2005 |
| Authors | Keller, S., P. Cantu, C. Moe, Y. Wu, S. Keller, U. K. Mishra, J. S. Speck, and S. P. DenBaars |
| Journal | Japanese journal of applied physics |
| Volume | 44 |
| Pagination | 7227 |