Title | Wafer separation technique for the fabrication of free-standing (Al, In, Ga) N wafers |
Publication Type | Miscellaneous |
Year of Publication | 2006 |
Authors | Speck, J., T. Baker, and B. Haskell |
Title | Wafer separation technique for the fabrication of free-standing (Al, In, Ga) N wafers |
Publication Type | Miscellaneous |
Year of Publication | 2006 |
Authors | Speck, J., T. Baker, and B. Haskell |