Plasma assisted molecular beam epitaxy of GaN with growth rates> 2.6 μm/h

TitlePlasma assisted molecular beam epitaxy of GaN with growth rates> 2.6 μm/h
Publication TypeJournal Article
Year of Publication2014
AuthorsMcSkimming, B. M., F. Wu, T. Huault, C. Chaix, and J. S. Speck
JournalJournal of Crystal Growth
Volume386
Pagination168–174