Electrical and structural properties of AlGaN/AlGaN superlattice structures grown by metal-organic chemical vapor deposition

TitleElectrical and structural properties of AlGaN/AlGaN superlattice structures grown by metal-organic chemical vapor deposition
Publication TypeJournal Article
Year of Publication2003
AuthorsKeller, S., P. Waltereit, P. Cantu, UK. Mishra, JS. Speck, and SP. DenBaars
JournalOptical Materials
Volume23
Pagination187–195