Plasma-assisted molecular beam epitaxy of Sn-doped In2O3: Sn incorporation, structural changes, doping limits, and compensation

TitlePlasma-assisted molecular beam epitaxy of Sn-doped In2O3: Sn incorporation, structural changes, doping limits, and compensation
Publication TypeJournal Article
Year of Publication2014
AuthorsBierwagen, O., and J. S. Speck
Journalphysica status solidi (a)
Volume211
Pagination48–53