Substrate Reactivity and ìControlled Contaminationî in Metalorganic Chemical Vapor Deposition of GaN on Sapphire

TitleSubstrate Reactivity and ìControlled Contaminationî in Metalorganic Chemical Vapor Deposition of GaN on Sapphire
Publication TypeJournal Article
Year of Publication1998
AuthorsGolan, Y., P. Fini, S. P. DenBaars, and J. S. Speck
JournalJapanese journal of applied physics
Volume37
Pagination4695