Title | Growth of A1N by the chemical vapor reaction process and its application to lateral overgrowth on patterned sapphire substrates |
Publication Type | Journal Article |
Year of Publication | 2004 |
Authors | Fujito, K., T. Hashimoto, K. Samonji, J. S. Speck, and S. Nakamura |
Journal | Journal of crystal growth |
Volume | 272 |
Pagination | 370–376 |