Growth of A1N by the chemical vapor reaction process and its application to lateral overgrowth on patterned sapphire substrates

TitleGrowth of A1N by the chemical vapor reaction process and its application to lateral overgrowth on patterned sapphire substrates
Publication TypeJournal Article
Year of Publication2004
AuthorsFujito, K., T. Hashimoto, K. Samonji, J. S. Speck, and S. Nakamura
JournalJournal of crystal growth
Volume272
Pagination370–376