Correlation between threading dislocation density and sheet resistance of AlGaN/AlN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy

TitleCorrelation between threading dislocation density and sheet resistance of AlGaN/AlN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2012
AuthorsKaun, S. W., M. Hoi Wong, U. K. Mishra, and J. S. Speck
JournalApplied Physics Letters
Volume100
Pagination262102