β-Ga 2 O 3 growth by plasma-assisted molecular beam epitaxy

Titleβ-Ga 2 O 3 growth by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2010
AuthorsTsai, M-Y., O. Bierwagen, M. E. White, and J. S. Speck
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume28
Pagination354–359