| Title | Growth and laser-assisted liftoff of low dislocation density AlN thin films for deep-UV light-emitting diodes |
| Publication Type | Journal Article |
| Year of Publication | 2004 |
| Authors | Kaeding, J. F., Y. Wu, T. Fujii, R. Sharma, P. T. Fini, J. S. Speck, and S. Nakamura |
| Journal | Journal of crystal growth |
| Volume | 272 |
| Pagination | 257–263 |