Title | Direct heteroepitaxial growth of thick AlN layers on sapphire substrates by hydride vapor phase epitaxy |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Kamber, D. S., Y. Wu, B. A. Haskell, S. Newman, S. P. DenBaars, J. S. Speck, and S. Nakamura |
Journal | Journal of crystal growth |
Volume | 297 |
Pagination | 321–325 |