Direct heteroepitaxial growth of thick AlN layers on sapphire substrates by hydride vapor phase epitaxy

TitleDirect heteroepitaxial growth of thick AlN layers on sapphire substrates by hydride vapor phase epitaxy
Publication TypeJournal Article
Year of Publication2006
AuthorsKamber, D. S., Y. Wu, B. A. Haskell, S. Newman, S. P. DenBaars, J. S. Speck, and S. Nakamura
JournalJournal of crystal growth
Volume297
Pagination321–325