Title | Interface trap characterization of atomic layer deposition Al2O3/GaN metal-insulator-semiconductor capacitors using optically and thermally based deep level spectroscopies |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Jackson, C. M., A. R. Arehart, E. Cinkilic, B. McSkimming, J. S. Speck, and S. A. Ringel |
Journal | Journal of Applied Physics |
Volume | 113 |
Pagination | 204505 |