Title | Smooth top-down photoelectrochemical etching of m-plane GaN |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Tamboli, A. C., M. C. Schmidt, S. Rajan, J. S. Speck, U. K. Mishra, S. P. DenBaars, and E. L. Hu |
Journal | Journal of The Electrochemical Society |
Volume | 156 |
Pagination | H47–H51 |