Smooth top-down photoelectrochemical etching of m-plane GaN

TitleSmooth top-down photoelectrochemical etching of m-plane GaN
Publication TypeJournal Article
Year of Publication2009
AuthorsTamboli, A. C., M. C. Schmidt, S. Rajan, J. S. Speck, U. K. Mishra, S. P. DenBaars, and E. L. Hu
JournalJournal of The Electrochemical Society
Volume156
PaginationH47–H51