Influence of stoichiometry on the dielectric properties of sputtered strontium titanate thin films

TitleInfluence of stoichiometry on the dielectric properties of sputtered strontium titanate thin films
Publication TypeJournal Article
Year of Publication2003
AuthorsTaylor, TR., PJ. Hansen, N. Pervez, B. Acikel, RA. York, and JS. Speck
JournalJournal of applied physics
Volume94
Pagination3390–3396