Title | Influence of stoichiometry on the dielectric properties of sputtered strontium titanate thin films |
Publication Type | Journal Article |
Year of Publication | 2003 |
Authors | Taylor, TR., PJ. Hansen, N. Pervez, B. Acikel, RA. York, and JS. Speck |
Journal | Journal of applied physics |
Volume | 94 |
Pagination | 3390–3396 |