Structural and morphological properties of GaN buffer layers grown by ammonia molecular beam epitaxy on SiC substrates for AlGaN/GaN high electron mobility transistors

TitleStructural and morphological properties of GaN buffer layers grown by ammonia molecular beam epitaxy on SiC substrates for AlGaN/GaN high electron mobility transistors
Publication TypeJournal Article
Year of Publication2008
AuthorsCorrion, AL., C. Poblenz, F. Wu, and JS. Speck
JournalJournal of Applied Physics
Volume103
Pagination093529