Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxy

TitleUniformity and control of surface morphology during growth of GaN by molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2005
AuthorsPoblenz, C., P. Waltereit, and JS. Speck
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Volume23
Pagination1379–1385