Title | Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxy |
Publication Type | Journal Article |
Year of Publication | 2005 |
Authors | Poblenz, C., P. Waltereit, and JS. Speck |
Journal | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena |
Volume | 23 |
Pagination | 1379–1385 |