Title | Nonalloyed ohmic contacts in AlGaN/GaN HEMTs by ion implantation with reduced activation annealing temperature |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Recht, F., L. McCarthy, S. Rajan, A. Chakraborty, C. Poblenz, A. Corrion, JS. Speck, and UK. Mishra |
Journal | IEEE electron device letters |
Volume | 27 |
Pagination | 205–207 |