In situ GaN decomposition analysis by quadrupole mass spectrometry and reflection high-energy electron diffraction

TitleIn situ GaN decomposition analysis by quadrupole mass spectrometry and reflection high-energy electron diffraction
Publication TypeJournal Article
Year of Publication2008
AuthorsFernández-Garrido, S., G. Koblmüller, E. Calleja, and J. S. Speck
JournalJournal of applied physics
Volume104
Pagination033541