| Title | Effect of nitridation on polarity, microstructure, and morphology of AlN films |
| Publication Type | Journal Article |
| Year of Publication | 2004 |
| Authors | Wu, Y., A. Hanlon, JF. Kaeding, R. Sharma, PT. Fini, S. Nakamura, and JS. Speck |
| Journal | Applied physics letters |
| Volume | 84 |
| Pagination | 912–914 |