Multi-fin β-Ga2O3 Vertical FinFET with Interfin Field Oxide Exhibiting a Breakdown Voltage of 1.8 kV and Power Figure of Merit of 1 GW/cm^2

TitleMulti-fin β-Ga2O3 Vertical FinFET with Interfin Field Oxide Exhibiting a Breakdown Voltage of 1.8 kV and Power Figure of Merit of 1 GW/cm^2
Publication TypeJournal Article
Year of Publication2025
AuthorsRoy, S., C. N. Saha, C. Peterson, W. J. Mitchell, J. S. Speck, and S. Krishnamoorthy
JournalIEEE Electron Device Letters
Volume47
Pagination341–344