| Title | Removal of Si impurities from GaN regrowth interfaces using XeF$_2$ |
| Publication Type | Journal Article |
| Year of Publication | 2025 |
| Authors | Biegler, Z. J., A. A. Allerman, and J. S. Speck |
| Journal | Applied Physics Letters |
| Volume | 127 |
| Title | Removal of Si impurities from GaN regrowth interfaces using XeF$_2$ |
| Publication Type | Journal Article |
| Year of Publication | 2025 |
| Authors | Biegler, Z. J., A. A. Allerman, and J. S. Speck |
| Journal | Applied Physics Letters |
| Volume | 127 |