Removal of Si impurities from GaN regrowth interfaces using XeF$_2$

TitleRemoval of Si impurities from GaN regrowth interfaces using XeF$_2$
Publication TypeJournal Article
Year of Publication2025
AuthorsBiegler, Z. J., A. A. Allerman, and J. S. Speck
JournalApplied Physics Letters
Volume127