n-type dopants in (001) β-Ga2O3 grown on (001) β-Ga2O3 substrates by plasma-assisted molecular beam epitaxy

Titlen-type dopants in (001) β-Ga2O3 grown on (001) β-Ga2O3 substrates by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2018
AuthorsHan, S-H., A. Mauze, E. Ahmadi, T. Mates, Y. Oshima, and J. S. Speck
JournalSemiconductor Science and Technology
Volume33
Pagination045001