Title | Heteroepitaxy on Compliant Substrates for Vertical and Horizontal Integration of Multi-Functional Devices |
Publication Type | Miscellaneous |
Year of Publication | 2001 |
Authors | Olson, GL., JA. Roth, TJ. de Lyon, JE. Jensen, and JS. Speck |
Title | Heteroepitaxy on Compliant Substrates for Vertical and Horizontal Integration of Multi-Functional Devices |
Publication Type | Miscellaneous |
Year of Publication | 2001 |
Authors | Olson, GL., JA. Roth, TJ. de Lyon, JE. Jensen, and JS. Speck |