Heteroepitaxy on Compliant Substrates for Vertical and Horizontal Integration of Multi-Functional Devices

TitleHeteroepitaxy on Compliant Substrates for Vertical and Horizontal Integration of Multi-Functional Devices
Publication TypeMiscellaneous
Year of Publication2001
AuthorsOlson, GL., JA. Roth, TJ. de Lyon, JE. Jensen, and JS. Speck