| Title | Atom probe tomography studies of Al2O3 gate dielectrics on GaN | 
| Publication Type | Journal Article | 
| Year of Publication | 2014 | 
| Authors | Mazumder, B., X. Liu, R. Yeluri, F. Wu, U. K. Mishra, and J. S. Speck | 
| Journal | Journal of Applied Physics | 
| Volume | 116 | 
| Pagination | 134101 | 
