| Title | ZrO 2 gate dielectrics produced by ultraviolet ozone oxidation for GaN and AlGaN/ GaN transistors |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Dora, Y., S. Han, D. Klenov, P. J. Hansen, K-soo. No, U. K. Mishra, S. Stemmer, and J. S. Speck |
| Journal | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena |
| Volume | 24 |
| Pagination | 575–581 |