Defect Characterization using Transmission Scanning Electron Microscopy

TitleDefect Characterization using Transmission Scanning Electron Microscopy
Publication TypeJournal Article
Year of Publication2018
AuthorsCallahan, Patrick, Jean-Charles Stinville, Eric Yao, McLean P. Echlin, Jungho Shin, Fulin Wang, Marc De Graef, Tresa M. Pollock, and Daniel S. Gianola
JournalMicroscopy and Microanalysis
Volume24
Pagination1836–1837