The Tri-Beam System: Femtosecond Laser Based Tomography in a Dual-Beam FIB

TitleThe Tri-Beam System: Femtosecond Laser Based Tomography in a Dual-Beam FIB
Publication TypeJournal Article
Year of Publication2011
AuthorsEchlin M, Mottura A, Pollock T
JournalMicroscopy and Microanalysis
Volume17
Pagination958–959