Femtosecond Laser Damage in Metals and Semiconductors During TriBeam Tomography

TitleFemtosecond Laser Damage in Metals and Semiconductors During TriBeam Tomography
Publication TypeJournal Article
Year of Publication2016
AuthorsEchlin MP, Titus M, Lenthe WC, Straw M, Gumbsch P, Pollock TM, Fraunhofer IWM
JournalMicrosc. Microanal
Volume22
Pagination3