Self-assembled monolayers of alkanethiolates on palladium are good etch resists

TitleSelf-assembled monolayers of alkanethiolates on palladium are good etch resists
Publication TypeJournal Article
Year of Publication2002
AuthorsJ.C. Love, DB Wolfe, M.L. Chabinyc, K.E. Paul, and G.M. Whitesides
JournalJOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume124
Pagination1576-1577
Date PublishedFEB 27
ISSN0002-7863
DOI10.1021/ja0125691