| Title | Printing methods and materials for large-area electronic devices |
| Publication Type | Journal Article |
| Year of Publication | 2005 |
| Authors | M.L. Chabinyc, W.S. Wong, A.C. Arias, S.E. Ready, R.A. Lujan, J.H. Daniel, B Krusor, R.B. Apte, A. Salleo, and R.A. Street |
| Journal | PROCEEDINGS OF THE IEEE |
| Volume | 93 |
| Pagination | 1491-1499 |
| Date Published | AUG |
| ISSN | 0018-9219 |
| Keywords | amorphous silicon, flat-panel display, polymer semiconductors, thin-film transistor |
| Abstract | Two digital printing methods for the fabrication of active matrix thin-film transistor (AM-TFT) backplanes for displays are described. A process using printed resists layers, referred to as digital lithography was used to fabricate arrays of hydrogenated amorphous silicon TFTs. TFTs were also fabricated using a combination. on of digital lithography to pattern metals and inkjet printing to pattern and deposit a polymeric semiconducting layer The relative performance of amorphous silicon and polymer TFTs were evaluated. The utility of digital lithographic processing was demonstrated by the fabrication of prototype reflective displays using electrophoretic media. |
| DOI | 10.1109/JPROC.2005.851492 |
