| Title | Flexible a-Si : H-based image sensors fabricated by digital lithography |
| Publication Type | Conference Paper |
| Year of Publication | 2007 |
| Authors | W.S. Wong, T.N. Ng, M.L. Chabinyc, R.A. Lujan, R.B. Apte, S. Sambandan, Scott Limb, and R.A. Street |
| Editor | Chu, V, S Miyazaki, A Nathan, J Yang, and HW Zan |
| Conference Name | AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007 |
| Publisher | Mat Res Soc |
| Conference Location | 506 KEYSTONE DRIVE, WARRENDALE, PA 15088-7563 USA |
| ISBN Number | 978-1-55899-949-7 |
| Abstract | Amorphous silicon-based x-ray image sensor arrays were fabricated on poly-ethylene naphthalate substrates at process temperatures below 180 degrees C. Patterning of the thin-film transistor backplane was accomplished using ink-jet printed etch masks. The sensor devices were found to be comparable to high-temperature processed devices. The integration of the sensor stack, TFT array and PEN substrate resulted in a flexible x-ray image sensor with 180 x 180 pixels with 75 dpi resolution. |
