Flexible a-Si : H-based image sensors fabricated by digital lithography

TitleFlexible a-Si : H-based image sensors fabricated by digital lithography
Publication TypeConference Paper
Year of Publication2007
AuthorsW.S. Wong, T.N. Ng, M.L. Chabinyc, R.A. Lujan, R.B. Apte, S. Sambandan, Scott Limb, and R.A. Street
EditorChu, V, S Miyazaki, A Nathan, J Yang, and HW Zan
Conference NameAMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007
PublisherMat Res Soc
Conference Location506 KEYSTONE DRIVE, WARRENDALE, PA 15088-7563 USA
ISBN Number978-1-55899-949-7
AbstractAmorphous silicon-based x-ray image sensor arrays were fabricated on poly-ethylene naphthalate substrates at process temperatures below 180 degrees C. Patterning of the thin-film transistor backplane was accomplished using ink-jet printed etch masks. The sensor devices were found to be comparable to high-temperature processed devices. The integration of the sensor stack, TFT array and PEN substrate resulted in a flexible x-ray image sensor with 180 x 180 pixels with 75 dpi resolution.