@article {echlin2016femtosecond, title = {Femtosecond Laser Damage in Metals and Semiconductors During TriBeam Tomography}, journal = {Microsc. Microanal}, volume = {22}, year = {2016}, pages = {3}, author = {Echlin, MP and Titus, M and Lenthe, WC and Straw, M and Gumbsch, P and Pollock, TM and Fraunhofer, IWM} }